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Osaka Vacuum TGkine
Mag-Lev Turbopump with Integrated Control Unit
Osaka Vacuum TGkine Series of Mag-Lev Turbopumps with fully integrated control unit available in 2000 l/s, 3000 l/s and 4000 l/s sizes.
– Integrated controller and power supply
– Energy saving
– Compact
– IP54 Standard
– Multiple interface options
– Conformed to International Standards:
CE / NRTL / SEMI-S2
Osaka Vacuum TGkine Pump
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Applications
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Solar cell manufacturing
Glass, optics coating
Film coating
Surface treatment, surface modification
LCD manufacturing
Semiconductor manufacturing
Accelerator, Space simulator